High-Qbulk-mode SOI square resonators with straight-beam anchors
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference23 articles.
1. Square-Extensional Mode Single-Crystal Silicon Micromechanical Resonator for Low-Phase-Noise Oscillator Applications
2. High-Q UHF micromechanical radial-contour mode disk resonators
3. Series-resonant VHF micromechanical resonator reference oscillators
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