RF efficiency measurements of inductively-coupled plasma H− ion sources at accelerator facilities

Abstract

Abstract Experimental campaigns were undertaken to understand and improve the coupling efficiency of Radio frequency (RF) power into the plasma in three accelerator-based ion sources. Different matching circuit and mechanical engineering setups were used and the network resistance calculated. The efficiency was then measured for a range of RF frequencies and input gas flows. Coupling efficiencies of around 60% were measured in setups using RF-coils mounted external to the plasma chamber. The efficiency is improved to 80% when the coil is immersed in the plasma, allowing closer coupling. As well as the coil geometry, the isolation transformer required for beam production contributes to the overall losses.