Experimentally validated computations of simultaneous ion and fast neutral energy and angular distributions in a capacitively coupled plasma reactor
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
https://iopscience.iop.org/article/10.1088/1361-6463/aba068/pdf
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1. The contribution of fast neutrals to cathode erosion in glow discharges
2. Monte Carlo model for the argon ions and fast argon atoms in a radio-frequency discharge
3. Energy- and angular distributions of argon neutrals and their influence on etching profiles
4. Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas
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