Material and optical properties of low-temperature NH3-free PECVD SiNxlayers for photonic applications-Reference-Cited by-同舟云学术

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Material and optical properties of low-temperature NH3-free PECVD SiNxlayers for photonic applications

Published:2016-12-01 Issue:2 Volume:50 Page:025106
ISSN:0022-3727
Container-title:Journal of Physics D: Applied Physics
language:
Short-container-title:J. Phys. D: Appl. Phys.

Author:

Domínguez Bucio Thalía,Khokhar Ali Z,Lacava Cosimo,Stankovic Stevan,Mashanovich Goran Z,Petropoulos Periklis,Gardes Frederic Y

Publisher

IOP Publishing

Subject

Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0022-3727/50/i=2/a=025106/pdf

Reference34 articles.

1. Mid-infrared photonics in silicon and germanium

2. Visible wavelength silicon nitride focusing grating coupler with AlCu/TiN reflector

3. New CMOS-compatible platforms based on silicon nitride and Hydex for nonlinear optics

4. Silicon Nitride and Related Materials

5. Silicon Nitride for Microelectronic Applications

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