Effect of the energy of hydrocarbon ions on diamond-like carbon films deposited on alumina microparticles through repeated pulsed discharge in hollow cathode with methane gas

Abstract

Abstract Diamond-like carbon (DLC)-modified alumina microparticles are expected to be an ideal filler that can greatly improve the thermal conductivity of epoxy-alumina composites with a high fill factor, while the composites can still maintain high dielectric properties. Plasma-enhanced chemical vapor deposition (PECVD) has been mostly used to prepare DLC film on bulk material, and the ion energy in the plasma shows a crucial influence on the properties of the DLC. However, the properties of the DLC on solid microparticles prepared through the PECVD method as well as the effect of the ion energy are still unclear. In this paper, DLC on alumina microparticles has been prepared through a highly efficient method of repeated pulsed hollow cathode discharge in methane gas, and the characteristics of the DLC on the alumina particles have been studied and analyzed. The morphology and bond composition of DLC on particles have been studied through electron microscopy, Raman spectrometer and x-ray photoelectron spectroscopy. The ion energy distribution in the discharge plasma was diagnosed and used to analyze its effect on the hybrid bond content of the DLC through correlation analysis. The correlation of the ion energies and the hybrid bond content of the DLC shows that hydrocarbon ions in the discharge plasma with an energy of 100–200 eV present the most benefit to the formation of the sp3 hybrid bond content of DLC film on alumina microparticles. In addition, hydrogen ions with an energy of 700–1000 eV are also beneficial to improve the sp3 hybrid bond content of the DLC film.