Comparison of Si and SiC MOSFETs responses to electrical stress and the observation of parameter recovery in SiC MOSFET by stress superposition

Abstract

Abstract In this study we examined the effects of room temperature DC and AC electrical stress on Si and SiC n-channel metal-oxide-semiconductor field effect transistors (MOSFETs). Measurement of threshold voltage, transconductance, subthreshold swing, charge pumping, and gate oxide breakdown are used to compare the impact of stress on Si MOSFETs and SiC MOSFETS, as well as to understand the processes of carrier injection and trapping at oxide and interface defects. DC stress is observed to promote negative charge buildup in the gate oxide and interface in Si MOSFETs. However, in SiC MOSFETs the net charge buildup sign alternates between negative and positive as the DC stress polarity is changed from positive to negative, respectively. For the same stress level, relative degradation in parameters of SiC MOSFETs are significantly smaller than those in Si MOSFETs, where in the latter interface state density, conductance, and subthreshold swing have degraded by up to 400%.The change of charge buildup sign explains our observation that degradation in SiC MOSFETs subjected to AC bipolar stress is insignificantly small, whereas AC stressing of Si MOSFETs is observed to be much more severe. Also, the superposition of alternating DC stress polarity eliminates the stress induced degradation in SiC MOSFETs thus enabling a straightforward process for parameter reconfiguration and recovery.