Mathematical modeling and experimental study on photoresist whirl-coating in convex-surface laser lithography-Reference-Cited by-同舟云学术

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Mathematical modeling and experimental study on photoresist whirl-coating in convex-surface laser lithography

Published:2009-08-14 Issue:10 Volume:11 Page:105408
ISSN:1464-4258
Container-title:Journal of Optics A: Pure and Applied Optics
language:
Short-container-title:J. Opt. A: Pure Appl. Opt.

Author:

Chen Long-jiang,Liang Yi-yong,Luo Jian-bo,Zhang Chun-hui,Yang Guo-guang

Publisher

IOP Publishing

Subject

Atomic and Molecular Physics, and Optics

Reference16 articles.

1. Analysis of the changes in efficiency across the ruled area of a concave diffraction grating

2. Experimental study of local and integral efficiency behavior of a concave holographic diffraction grating

3. Low-distortion imaging spectrometer designs utilizing convex gratings

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