Micro-opto-electro-mechanical systems alignment stages with Vernier latch mechanisms
Author:
Publisher
IOP Publishing
Subject
Atomic and Molecular Physics, and Optics
Reference22 articles.
1. Laterally Driven Polysilicon Resonant Microstructures
2. Micromechanical comb actuators with low driving voltage
3. Fabrication of high frequency two-dimensional nanoactuators for scanned probe devices
4. Vertical comb array microactuators
5. Thermo-magnetic metal flexure actuators
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Buckling Electrothermal NEMS Actuators: Analytic Design for Very Slender Beams;Micro;2022-01-13
2. Microactuators;Smart Sensors and MEMs;2018
3. Analysis of CAD Model-based Visual Tracking for Microassembly using a New Block Set for MATLAB/Simulink;International Journal of Optomechatronics;2015-07-25
4. Characterization of Model-Based Visual Tracking Techniques for MOEMS Using a New Block Set for MATLAB/Simulink;2014 International Symposium on Optomechatronic Technologies;2014-11
5. Development of a MEMS repulsive actuator for large out-of-plane force;Journal of Micromechanics and Microengineering;2014-02-28
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3