Performance advances in interferometric optical profilers for imaging and testing
Author:
Publisher
IOP Publishing
Subject
Atomic and Molecular Physics, and Optics
Reference41 articles.
1. INTERFEROMETRY | Phase-Measurement Interferometry
2. Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm
3. Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry
4. Spatial and temporal phase-measurement techniques: a comparison of major error sources in one dimension
5. Profilometry with a coherence scanning microscope
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