Development of multi-step processing in silicon-on-insulator for optical waveguide applications
Author:
Publisher
IOP Publishing
Subject
Atomic and Molecular Physics, and Optics
Reference18 articles.
1. Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology
2. Lossless optical modulation in a silicon waveguide using stimulated Raman scattering
3. A high-speed silicon optical modulator based on a metal–oxide–semiconductor capacitor
4. Silicon-on-insulator photonic integrated circuit (SOI-PIC) technology
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