Lithography-free and high-efficiency preparation of black phosphorous devices by direct evaporation through shadow mask
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Published:2022-03-08
Issue:22
Volume:33
Page:225201
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ISSN:0957-4484
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Container-title:Nanotechnology
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language:
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Short-container-title:Nanotechnology
Author:
Ni Junhao,
Mi Huiru,
Tan Pu,
An Xuhong,
Gao Lei,
Luo XiaoguangORCID,
Cai Zhengyang,
Ni ZhenhuaORCID,
Gu Xiaofeng,
Xiao ShaoqingORCID,
Nan HaiyanORCID,
Ostrikov Kostya (Ken)ORCID
Abstract
Abstract
Two-dimensional (2D) materials including black phosphorus (BP) have been extensively investigated because of their exotic physical properties and potential applications in nanoelectronics and optoelectronics. Fabricating BP based devices is challenging because BP is extremely sensitive to the external environment, especially to the chemical contamination during the lithography process. The direct evaporation through shadow mask technique is a clean method for lithography-free electrode patterning of 2D materials. Herein, we employ the lithography-free evaporation method for the construction of BP based field-effect transistors and photodetectors and systematically compare their performances with those of BP counterparts fabricated by conventional lithography and transfer electrode methods. The results show that BP devices fabricated by direct evaporation method possess higher mobility, faster response time, and smaller hysteresis than those prepared by the latter two methods. This can be attributed to the clean interface between BP and evaporated-electrodes as well as the lower Schottky barrier height of 20.2 meV, which is given by the temperature-dependent electrical results. Furthermore, the BP photodetectors exhibit a broad-spectrum response and polarization sensitivity. Our work elucidates a universal, low-cost and high-efficiency method to fabricate BP devices for optoelectronic applications.
Funder
National Nature Science Foundation
Natural Science Foundation of Jiangsu Province, China
Postdoctoral Foundation
Fundamental Research Funds for the Central Universities of China
Research Innovation Program
111 Project
Australian Research Council
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science,General Chemistry,Bioengineering
Cited by
1 articles.
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