Temperature effect on the mechanical characteristics of niobium nitride thin films
Author:
Publisher
IOP Publishing
Subject
General Medicine
Link
http://stacks.iop.org/1757-899X/499/i=1/a=012005/pdf
Reference10 articles.
1. Effects of Heat-treatment on Mechanical Properties and Corrosion Resistance of NbN Films
2. Microstructure and tribological properties of NbN-Ag composite films by reactive magnetron sputtering
3. Characteristics of reactively sputtered niobium nitride thin films as diffusion barriers for Cu metallization
4. Nanomechanical properties of NbN films prepared by pulsed laser deposition using nanoindendation
5. Structural and mechanical properties of NbN and Nb-Si-N films: Experiment and molecular dynamics simulations
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