Microstructure and mechanical properties of Ni-Al intermetallic thin coatings produced by magnetron sputtering

Abstract

Abstract In the present study the thin NiAl intermetallic foils formed on different types of substrates by magnetron sputtering technique were investigated. To provide the deposition of intermetallic NiAl compound in one step without additional heat treatment the composite targets assembled from parts of Al and Al plates were used. The structure of formed thin NiAl coatings was studied using scanning electron microscopy and X-ray diffraction analysis. Mechanical properties were assessed by nanohardness indentation and wear testing of deposited coatings. During sputtering the distance from the target to the substrates varied from 60 to 100 mm to estimate the effect of this parameter on structure and properties of the coatings. The results revealed that thin coatings sputtered at the closer distance from the target to the substrates had the higher hardness about 11 GPa and exhibited the high level of wear properties.