Structural analysis of performance optimization of high g accelerometer chip

Abstract

Abstract Accelerometers based on micro-electromechanical systems (MEMS) technology are widely used due to their high cost performance and easy integration. However, there are still weaknesses in the mutual limitation of sensitivity and natural frequency in ordinary MEMS acceleration-sensitive structures. In this paper, a new type of piezoresistive acceleration-sensitive structure is optimized. The specific parameters are optimized by finite element simulation. Finally, the natural frequency of the sensitive unit reaches 2.039MHz and the sensitivity reaches 0.546μV / g.