Solution of the problem of interaction between capacitive coupled radio-frequency discharge and a sample
Author:
Publisher
IOP Publishing
Subject
General Medicine
Link
http://stacks.iop.org/1757-899X/158/i=1/a=012024/pdf
Reference35 articles.
1. Plasma Chemistry
2. Physics of Radio-Frequency Plasmas
3. Electrodynamics of microwaves in a coaxial non-regular waveguide partly filled with plasma
4. Characteristics of the Electrode Plasma of an Electrode Microwave Discharge in Hydrogen
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4. Numerical solution of the model problem of CCRF-discharge at atmospheric pressure;MATEC Web of Conferences;2017
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