Correlation between the residual stress in 3C-SiC/Si epifilm and the quality of epitaxial graphene formed thereon
Author:
Publisher
IOP Publishing
Subject
General Medicine
Link
http://stacks.iop.org/1757-899X/79/i=1/a=012004/pdf
Reference40 articles.
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1. Molecular Layer Deposition and Pyrolysis of Polyamide Films on Si(111) with Formation of β-SiC;Russian Journal of Physical Chemistry A;2021-07
2. Controllable Synthesis of Few-Layer Graphene on β-SiC(001);Silicon Materials;2019-08-07
3. Atomic Structure and Electronic Properties of Few‐Layer Graphene on SiC(001);Handbook of Graphene;2019-06-17
4. Graphene on cubic-SiC;Progress in Materials Science;2017-08
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