Author:
Song Ningran,Zhou Guangxu,Zhu Mengmei,Ma Shuyuan,Mu Yongyun,Gao Jia
Abstract
Abstract
This paper proposes a two-dimensional magnetic positioning stage with a sandwiched coplanar structure. The novel symmetric compensation structure can realize the steady levitation of the platform, which is of vital importance to the positioning accuracy. To verify the reliability of the special structure, vibration modal, thermal deformation and mechanical deformation of the sandwiched maglev positioning stage under different working conditions are analyzed in finite element method. The simulation results show that this novel structure can meet the working requirements.
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