Electrothermal micro tweezer for biomedical applications

Abstract

Abstract This paper presents design, simulation and results analysis for a novel micro tweezer. The principal element in the proposed device is a double U-beam electrothermal actuator. Using FEM tool, Poly-Silicon material is applied to the device structure and analysed for both in-plane and out of plane displacement for respective range of actuation potential. The micro tweezer holder mouth provided a maximum in-plane displacement of ∼48µm at 4.5V actuation voltage. Comparatively negligible out of plane displacement exhibited by the device during simulation. The proposed micro tweezer is designed for the micromanipulation of biological cells in a better way.