Determination of heat fluxes and surface temperatures during magnetron sputtering with a cold and hot target
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Published:2018-07
Issue:
Volume:387
Page:012010
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ISSN:1757-8981
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Container-title:IOP Conference Series: Materials Science and Engineering
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language:
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Short-container-title:IOP Conf. Ser.: Mater. Sci. Eng.
Cited by
1 articles.
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