Characterization of sputtered zirconium nitride films deposited at various argon:nitrogen ratio
Author:
Publisher
IOP Publishing
Subject
General Medicine
Link
http://stacks.iop.org/1757-899X/149/i=1/a=012015/pdf
Reference15 articles.
1. Tribological behaviour and mechanical properties of physical-vapour-deposited hard coatings: TiNx, ZrNx, TiCx, TiCx/i-C
2. Ion beam assisted deposition of zirconium nitrides for modulated optical index structures
3. Sputtering deposition and characterization of zirconium nitride and oxynitride films
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