Fundamental Study on Hysteresis Reduction of Piezoelectric Actuators by Preload Control

Abstract

Abstract Piezoelectric actuator is usually used in feedback system because of the hysteresis non-linearity of between input voltage and output displacement. The aim of this paper is analysis of the hysteresis to reduce cost of high precision positioning system by piezoelectric actuator with open-loop control. Ratio of max hysteresis to max displacement, RHD, has been proposed as an evaluation indicator for the hysteresis. Effects of compressive stresses, i.e. preload, in two directions on RHD were investigated and bulk and stacked piezoelectric actuators with low RHD have been studied experimentally.