Uncertainty determination of a microvolume characterized through confocal microscope technique

Abstract

Abstract Standardized measurements protocols are widely used and necessary in order to ensure a relivable and repetitive data. This work introduces a new procedure to measure the volume of any irregular micro-hole on a rough surface. A filtering and fitting model is proposed for calculating the void volume of the cavity. Experimental point cloud is acquired by optically measuring the micro-hole with a confocal microscope. RANSAC algorithm is used to establish the reference plane, while the limits of the cavity and the volume are determined by a proposed algorithm. The mentioned model is validated by measuring six real samples. In addition, the corresponding uncertainty is estimated by using Monte Carlo method.