Focussed ion beam thin sample microanalysis using a field emission gun electron probe microanalyser
Author:
Publisher
IOP Publishing
Subject
General Medicine
Link
http://stacks.iop.org/1757-899X/304/i=1/a=012007/pdf
Reference29 articles.
1. Electron Probe Microanalysis: A Review of the Past, Present, and Future
2. Spatial Resolution of a Wavelength-Dispersive Electron Probe Microanalyzer Equipped with a Thermal Field Emission Gun
3. Measurement and Monte Carlo simulation of the spatial resolution in element analysis with the FEG-EPMA JEOL JXA-8530F
4. Characterisation of sub-micrometre features with the FE-EPMA
5. Improving the quantification at high spatial resolution using a field emission electron microprobe
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