Author:
Almaev A V,Yakovlev N N,Chernikov E V
Abstract
Abstract
The results of investigation of the gas-sensitive properties of sensors based on the tin dioxide thin films with combined additives of gold and nickel obtained by the DC - magnetron sputtering are presented. The investigated sensors are characterized by a high response to low concentrations of NO2 of 0.45 – 10.23 ppm at temperatures of 50 – 150 °C with response time of 10 s. The sensitivity of sensors to hydrogen appears at the temperature of 250 °C. The hydrogen sensors are characterized by high reproducibility of the measurement results. The obtained results are explained by the synergistic effect of gold and nickel additives, as well as the ability of the Ni to prevent the interaction of hydrogen with lattice oxygen atoms in the subsurface part of tin dioxide.