Design and optimization of piezo resistors for a graphene based MEMS ICP sensor

Abstract

Abstract Modeling and simulation of MEMS Intracranial pressure sensor using Graphene as the structural layer is defined. At normal health condition, the ICP pressure is in the range of 10-15 mmHg. Any variation from this range will signify the abnormalities such as neural system malfunction, nausea, vomiting, paralysis, brain tumor rupturing, and excitement.For Intracranial pressure sensing applications, to measure this slight variation of pressure a sensor having high sensitivity need to be employed and is solely depends on membrane used. properties of high young’s modulus, high thermal stability and electrical conductivity, inertness and zero band gap made it biocompatible to fabricate Intracranial piezoresistive pressure (ICP) sensor with membrane as graphene. COMSOL Multiphysics tool which is a finite element analysis (FEA) is deployed to optimize the dimensions and parameters for using graphene as a structural layer for pressure sensor diaphragm. A variability study of piezo resistors with three different meander shape are designed and simulated in COMSOL. The optimum design is further analyzed for three different type of pressure sensor specifications as conventional, with n-type dopant and graphene as a structural layer. The design with three meander resistance and graphene as a structural layer provides a strain induced of 0.14 with the pressure input of 10 mmHg.