Study on the Weak Stress in Flexural MEMS Cantilever
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Published:2018-03
Issue:
Volume:326
Page:012008
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ISSN:1757-8981
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Container-title:IOP Conference Series: Materials Science and Engineering
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language:
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Short-container-title:IOP Conf. Ser.: Mater. Sci. Eng.
Author:
Ge Yuetao,Ren Yan