Solute diffusion in plastically deformed silicon crystals
Author:
Publisher
IOP Publishing
Subject
General Engineering
Link
https://iopscience.iop.org/article/10.1088/0508-3443/18/4/303/pdf
Reference25 articles.
1. On Strain‐Enhanced Diffusion in Metals. I. Point Defect Models
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4. Geometrical considerations concerning the structural irregularities to be assumed in a crystal
5. Diffusion of antimony in germanium during plastic straining
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1. Stress-Assisted Diffusion of Boron and Arsenic in Silicon;MRS Proceedings;1984
2. Silicon Material Properties for VLSI Circuitry;VLSI Electronics Microstructure Science;1982
3. Submicrometer-Linewidth Laser Doping;MRS Proceedings;1982
4. Concentration Profiles of Diffused Dopants in Silicon;Impurity Doping Processes in Silicon;1981
5. The effect of strain‐induced band‐gap narrowing on high concentration phosphorus diffusion in silicon;Journal of Applied Physics;1979-02
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