Nanofabrication by advanced electron microscopy using intense and focused beam∗
Author:
Affiliation:
1. High Voltage Electron Microscopy Station, National Institute for Materials Science, 3-13 Sakura, Tsukuba 305-0003, Japan
Publisher
Informa UK Limited
Subject
General Materials Science
Link
https://www.tandfonline.com/doi/pdf/10.1088/1468-6996/9/1/014110
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