Nanomechanical properties of silicon surfaces nanostructured by excimer laser
Author:
Publisher
Informa UK Limited
Subject
General Materials Science
Link
http://www.tandfonline.com/doi/pdf/10.1088/1468-6996/11/2/025003
Reference31 articles.
1. Pulsed TEA CO2 laser surface modifications of silicon
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4. Silicon nanostructures for photonics
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