Sensitivity enhanced temperature sensor: one-port 2D surface phononic crystal resonator based on AlN/sapphire
Author:
Publisher
IOP Publishing
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://iopscience.iop.org/article/10.1088/1361-6641/ab0a82/pdf
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1. History of SAW devices
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4. AlN-based surface acoustic wave resonators for temperature sensing applications
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