Flexible field-effect transistors with high-quality and uniform single-layer graphene for high mobility

Abstract

Abstract In this work, a fully flexible graphene field-effect transistor with high carrier mobility is reported. Patterned high-quality and uniform single-layer graphene films are successfully realized by combining the selective growth on a patterned copper foil and the direct transfer method to minimize degradation factors. The selectively grown single-layer graphene is directly transferred to the target substrate through the deposition of poly-para-xylylene (Parylene) C. The quality of the graphene films is confirmed by Raman spectroscopy. The analysis reveals that the use of Parylene C as the substrate, gate dielectric, and encapsulation layer has the advantage of reducing the scattering by the optical phonons and charge puddles. The estimated residual carrier density is 1.72 × 1011 cm−2, and the intrinsic hole and electron carrier mobilities are found to be as high as 10 260 and 10 010 cm2 V−1 s−1, respectively. This study can pave the way for the development and mass production of high-performance and fully flexible graphene electronics.