Infrared Gas Sensor Based on MEMS Technology for Gas Detection

Abstract

Abstract This paper presents an infrared gas sensor based on MEMS technology. The sensor can detect the input, output light intensity, and perform data processing. According to the corresponding results, the concentration of the gas to be measured can be obtained. The thickness of the protective layer and supporting layer of the infrared sensor transmitting unit can be changed. The proper size can make the transmitting unit work in a state of low deformation and high efficiency. The concentration of gas to be measured can be measured indirectly by using the sensor to detect the change of resistance of the unit. In this paper, the thickness of the protective layer and the supporting layer of the sensor transmitting unit is analyzed by finite element analysis. It is found that the thickness has a linear relationship with the deformation and temperature of the bridge deck. Further, it can be seen that when the thickness of the emission layer and the support layer is selected at the appropriate size, it has a good working state. Therefore, the sensor has good infrared emission intensity and stability. It has a broad application prospect in the early fire characteristic gas monitoring of cable.