Methodology of accounting technological and operational factors in the process of complex optimal design of micro and nanodevices, manufactured using group technologies

Abstract

Abstract The problem of ensuring micro and nanodevices’ main quality indices (performance, reliability and manufacturability) at design stage is considered. Group technologies used in micro and nanodevices’ production provide high correlation of device parameters formed simultaneously in single technological cycle. This imposes restrictions on the methods of ensuring the serial availability and reliability of micro and nanodevices. Existing design technique does not allow to reach optimal combination of performance, manufacturability and reliability indices for devices batch. The purpose of this paper is to develop a micro and nanodevices’ complex design methodology that would allow to reach optimal combination of main quality indices using existing group technologies: performance indices and serial availability in given manufacturing conditions and reliability in given operating conditions. To achieve this goal an additional stage of design and technological optimization is introduced into conventional process scheme. Input parameters for this stage are device’s design parameters from circuit design and design engineering stages, technological errors of these parameters from technological preparation stage and data on the device design parameters and performance indices’ kinetics under given operating conditions. As a result of the optimization, corrections to the nominal device design parameters that maximize the target function are determined. The objective function is either probability of finding device performance indices inside imposed limits range, or probability of performing specified functions during given operating time, or gamma-percent operating time to parametric failure. Submitted methodology was tested on micro and nanoelectronic devices, namely, microwave mixer and rectifier with resonant-tunneling diode as nonlinear element.