Design, modelling and simulation of vibratory micromachined gyroscopes
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/34/i=1/a=125/pdf
Reference5 articles.
1. A symmetric surface micromachined gyroscope with decoupled oscillation modes
2. A single-crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate
3. Fluid effects in vibrating micromachined structures
4. Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems
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