Electron spectroscopy of various nanostructured carbon films

Abstract

Abstract X-ray photoelectron spectroscopy technique have been used to study carbon films obtained by means of ion-plasma deposition in the plasma of different chemical composition. The detailed analysis of electron spectroscopy data made it possible to determine the structure of the films and the influence of nitrogen and hydrogen admixture in plasma on the structural properties. Diamond-like films are obtained in pure argon plasma, graphite-like and carbon chain structures correspond to nitrogen and hydrogen addition respectively.