Development, synthesis and production of multilayer thin-film filters for infrared sensors for monitoring of flammable gases and vapors of flammable liquids

Abstract

Abstract We present the results of development and production of multilayer thin-film filters for infrared sensors for monitoring of flammable gases and vapors of flammable liquids. This paper addresses technological peculiarities of their production. A theoretical simulation of multilayer filter parameters to provide the transparency in wavelength range 3.3 - 3.5 μm was carried out. It is demonstrated that spectral characteristics of produced multilayer filter correspond to the calculated ones.