Analysis of gas thermal conductivity at low pressures using a mathematical-physical model

Abstract

As part of the research in the field of pumping vacuum chambers in the Environmental Electron Microscope, research on supersonic flow through apertures is being carried out at the Department of Electrical and Electronic Technology of the Brno University of Technology in cooperation with the Institute of Scientific Instruments of the CAS. This paper deals with the effect of low pressures on the thermal conductivity of gases that occurs when observing samples in the Environmental Electron Microscope.