Dual-environment-driven MEMS pyrotechnic actuators
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Published:2023-06-01
Issue:10
Volume:2478
Page:102017
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ISSN:1742-6588
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Container-title:Journal of Physics: Conference Series
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language:
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Short-container-title:J. Phys.: Conf. Ser.
Author:
Li H,Luo J J,Xu X,Feng C Y,Liu T,Gao Y Y
Abstract
Abstract
In this paper, through the research on the driving mechanism and structure design of the MEMS silicon-based actuator that can realize the dual-environment force release function, a MEMS actuator that can be released from the dual-environment is designed. It is based on the mass-gear mechanism (inertial drive) centrifugal force drive design. The actuator can achieve 1.5mm output displacement under the control of 10V DC voltage, under the condition that the centrifugal is not less than 5000 r/min, it can realize the safety release function, and can resist overload 10000g. The micro-detonation device has a high degree of integration, initially realizes the function of releasing the force of the silicon-based inertial environment, and has good compatibility with MEMS technology.
Subject
Computer Science Applications,History,Education
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