Author:
Su Jianxiu,Wang Yipu,Liu Haixu,Zhang Xiaofeng,Wang Zhankui
Abstract
Abstract
Stainless steel will become one of the main substrate materials of flexible large-scale display. The biggest problem of stainless steel as flexible display substrate is that the surface roughness is too large, so it is necessary to be ultra-precision machining on its surface, such as the chemical mechanical polishing (CMP). How to select the most representative measurement points in measuring surface roughness after CMP is the first problem to be solved. Based on the idea of orthogonal design, taking a roll of ultra-thin flexible stainless steel substrate as an example, the method and algorithm of selecting 12 measuring points on a 600mm×100mm rectangular area are obtained. This method avoids the blindness in random selection of measurement points, and reduces the workload of selecting measurement points. It can provide a reference for the selection of measurement points on the large-scale surface after ultra-precision machining.
Subject
General Physics and Astronomy