Improved the Surface Roughness of Silicon Nanophotonic Devices by Thermal Oxidation Method
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/276/i=1/a=012087/pdf
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1. Measurement of Strains at Si‐SiO2 Interface
2. Radiation loss from planar waveguides with random wall imperfections
3. Effect of size and roughness on light transmission in a Si/SiO2 waveguide: Experiments and model
4. Width Dependence of Inherent TM-Mode Lateral Leakage Loss in Silicon-On-Insulator Ridge Waveguides
5. Manufacturability of rapid-thermal oxidation of silicon: oxide thickness, oxide thickness variation, and system dependency
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1. Ultracompact single-layer optical MEMS accelerometer based on evanescent coupling through silicon nanowaveguides;Scientific Reports;2022-12-15
2. Finishing of Rough Sidewalls of a Silicon-on-Insulator Nano-Optical Waveguide Using Laser Surface Melting;Strength of Materials;2021-07
3. Dynamics of Gold Droplet Formation on SiO2/Si(111) Surface;The Journal of Physical Chemistry C;2020-05-06
4. Surface Morphology of Silicon Waveguide after Reactive Ion Etching (RIE);Coatings;2019-07-29
5. Growth and Self-Assembly of Silicon–Silicon Carbide Nanoparticles into Hybrid Worm-Like Nanostructures at the Silicon Wafer Surface;Nanomaterials;2018-11-20
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