Author:
Hu Chang’an,Yang Li,Lv Fei,Li Jieji,Zhao Tao,Wu Yu,Xue Liang
Abstract
Abstract
The step profiler has the advantages of excellent repeatability and high resolution. However, as a new contact measurement equipment, it has specific measurement errors. This paper proposes a novel method to evaluate a step profiler’s accuracy by measuring the nano grating standard structure. These standard step height and pitch samples are used in the measurement process. The samples’ morphological characteristics were obtained by Fourier transformation, phase modulation, and phase splicing of the sampled data. The experimental results show that the step profiler’s vertical and horizontal relative measurement uncertainty is 4.0% and 1.2%.
Subject
General Physics and Astronomy
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