Ion Trajectory Analysis in FIB Microscope to Study the Dielectric Constant using Mirror Method

Author:

Hazime Luna Basil,Zoory Muayyed Jabar

Abstract

Abstract The current work used the same mathematical model that was used to study the behavior of an accelerated probing electron in order to create electron-mirror images [1]. Using straightforward trigonometry, this mathematical model was used to investigate the properties of the polymer PMMA as a result of the ion mirror effect phenomenon. This work also considers determining the influence of dielectric constant, which is one of the most important electrical properties of the material by using MATLAB simulation to help the practical results that we obtained and comparing it to the findings obtained for the electron mirror. The obtained results indicate that the presented methodology can be used to explain, interpret, and add further detail to the understanding of the ion mirror effect for future studies.

Publisher

IOP Publishing

Subject

General Physics and Astronomy

Reference18 articles.

1. Computational investigation of electron path inside SEM chamber in mirror effect phenomenon;Al-Obaidi;Micron,2013

2. Focused ion beam as an inspection tool for microsystem technology;Reyntjens,1998

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