Characterization of ZrO2and (ZrO2)x(Al2O3)1−Xthin films on Si substrates: effect of the Al2O3component
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/514/i=1/a=012011/pdf
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4. Deposition and Properties of the Pseudobinary Alloy (Al2O3)x(TiO2)1-xand Its Application for Silicon Surface Passivation
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