Static response of MEMS double layered simply supported beams containing quasicrystals

Abstract

Abstract The static response of Micro-electromechanical system (MEMS) double-layer simply-supported beams made of quasicrystalline (QC) and crystal (C) is studied considering the influence of nonlocal scale effects. In light of the theory of nonlocal elasticity for QCs, the closed responses of phonon, phason, and electric fields are derived using the state vector formula and propagator matrix method. Calculation results indicate that theoretical responses are consistent with the simulation ones via the finite element. Among the three micro-distributed forces, the magnitude of their effects is in order of electric field, Casimir, and van der Waals micro-forces. The rising van der Waals and Casimir micro-forces elevates the displacement with the stress of beams. The displacement decreases slowly when nonlocal scale parameters grow. The phonon displacement of microbeams with C/QC stacking order is larger than the corresponding value of QC/C stacking order. This paper’s results support the design and evaluation of MEMS structures containing QCs.