Micro patterning of fused silica by ArF- and F2-laser ablation
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/59/i=1/a=045/pdf
Reference14 articles.
1. Micromachining of quartz with ultrashort laser pulses
2. Femtosecond-pulse visible laser processing of transparent materials
3. Nanosecond and femtosecond excimer laser ablation of fused silica
4. One-step microfabrication of fused silica by laser ablation of an organic solution
5. Direct fabrication of microgratings in fused quartz by laser-induced plasma-assisted ablation with a KrF excimer laser
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