Author:
Pang Yawen,Zhang Congchun,Lei Peng,Wang Yusen,Lv Zhenjie
Abstract
Abstract
Influences of annealing temperature on microstructure, electrical properties, stability, and film adhesion of Pt thin film resistors with Ti interlayer and PtxOy interlayer were investigated and compared. Pt thin films were deposited on Al2O3 substrates with Ti interlayer and PtxOy interlayer, respectively. Two resistors showed different microstructures after annealing. Pt/PtxOy film resistor owed more stable resistance value and larger temperature coefficient of resistance (TCR) than those of Pt/Ti film resistor. Annealed Pt/Ti film resistor exhibited poor stability than Pt/PtxOy film resistor and the stability became worse with increasing annealing temperature. In addition, the film adhesion of two resistors was discussed.
Subject
General Physics and Astronomy
Cited by
1 articles.
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