Load model and parameter measurement method of DBD for power supply design

Abstract

Abstract Plasma is widely used in sterilization and disinfection, environmental treatment, and material surface modification. At present, the DBD load equivalent circuit model used in the design of dielectric barrier discharge (DBD) low-temperature plasma generator power supply mainly includes the nonlinear clamping model and linear resistance capacitance model, which have advantages and disadvantages in the research and application of DBD load. This paper focuses on the modeling and parameter acquisition method of the RC parallel DBD load linear model, adds measurement capacitance to the discharge load loop, and obtains RC parallel equivalent model parameters by Q-V and I-V Lissajous-Figure analysis. After the experimental data is processed, the simulation circuit model is built by MATLAB/SIMULINK, and the experimental results are compared with the simulation calculation results. They verify the feasibility of the DBD load parameter measurement scheme and comprehensively demonstrate that the DBD load linear resistance capacitance model has important guiding significance in the design of the DBD power supply.