Direct 3D printed shadow mask on Silicon
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/757/i=1/a=012021/pdf
Reference8 articles.
1. Insitugrown‐in selective contacts ton‐i‐p‐idoping superlattice crystals using molecular beam epitaxial growth through a shadow mask
2. A silicon shadow mask for deposition on isolated areas
3. Deep plasma etching of glass with a silicon shadow mask
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