Physical properties of zirconium oxynitride films deposited by reactive magnetron sputtering
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Reference11 articles.
1. Towards understanding the superior properties of transition metal oxynitrides prepared by reactive DC magnetron sputtering
2. Structural, electrical, optical, and mechanical characterizations of decorative ZrOxNy thin films
3. Property change in ZrNxOy thin films: effect of the oxygen fraction and bias voltage
4. Synthesis and characterization of nanocrystalline ZrNxOy thin films on Si by ion plating
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4. Photocatalytical and corrosion behavior of sputtered zirconium oxynitride thin films doped with titanium;Surfaces and Interfaces;2023-11
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