Evaluation of magnetic properties of thin magneto-dielectric films deposited from beam plasma in medium vacuum

Abstract

Abstract By electron-beam evaporation of a solid state dielectrics (alumina ceramics) and a magnetic material (steel-3) in fore-vacuum, thin films of several μm, possessing both dielectric and magnetic properties, were deposited on a substrate. The work shows that the microstrip resonator method can be used to assess the presence of magnetic properties in films.